面外熱駆動Auナノグレーティングを用いたマイクロ光学位相子の透過率変調

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2017/11/01

タイトル(英語): Transmission Modulation of Micro Retarder Using Out-of-Plane Thermally-Driven Au Nanograting

著者名: 志村　崇（東京農工大学），岩見　健太郎（東京農工大学），梅田　倫弘（東京農工大学）

著者名(英語): Takashi Shimura (Tokyo University of Agriculture and Technology), Kentaro Iwami (Tokyo University of Agriculture and Technology), Norihiro Umeda (Tokyo University of Agriculture and Technology)

キーワード: 位相子，メタサーフェス，ナノグレーティング，表面プラズモン，MEMS，バイモルフアクチュエータ　　retarder，metasurface，nanograting，Surface plasmon，MEMS，bimorph actuator

要約(英語): A reconfigurable transmittance modulation device for Au nanograting retarder that consisted of out-of-plane thermally-driven grating was designed, fabricated, and demonstrated. In this study, an Au nanograting that is known to exhibit giant birefringence was constituted by integrating MEMS thermal actuators. The thermally-driven grating was made of Au/SiO2 bimorph beams that period and slit width are 800 nm and 400 nm, respectively. The device is fabricated on a glass substrate with embedded Si as a sacrificial layer. The gap between the grating and the substrate is changed by applying driving current, and transmittance was changed affected by Fabry-Perot interference. Transmittance peak wavelength for TE polarization was shifted up to 40 nm keeping the retardation of the Au nanograting. A calculation model of transmittance applying multilayer interference was proposed and demonstrated its effectiveness in TE polarization. By optimizing the design dimensions of the Au nanograting, it is expected to realize a microscale waveplate capable of transmittance modulation.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.137 No.11 （2017） 特集：メタマテリアル・プラズモニクス

本誌掲載ページ: 400-406 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/137/11/137_400/_article/-char/ja/