Two-Dimensional Displacement Control of Piezoelectric Actuator Stage Driven by Series of Current Pulses

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2018/01/01

タイトル(英語): Two-Dimensional Displacement Control of Piezoelectric Actuator Stage Driven by Series of Current Pulses

著者名: Katsushi Furutani (Toyota Technological Institute), Atsushi Sakata (Toyota Technological Institute)

著者名(英語): Katsushi Furutani (Toyota Technological Institute), Atsushi Sakata (Toyota Technological Institute)

キーワード: piezoelectric actuator，current pulse drive，genetic algorithm，point-to-point control，continuous path control

要約(英語): Previously, we proposed a method for driving a piezoelectric actuator using current pulses, for high-resolution and small residual vibrations. In the proposed approach, the driving pulse patterns were designed using a genetic algorithm. In this paper, positioning performance of a stage with two degrees of freedom was compared with the voltage drive by an input shaper and PI control. To enable point-to-point control, the stage was positioned at eight vertices of an octagon by input shaping, or the current pulse drive. The positioning accuracy by the current pulse drive was better than that by the voltage drive, owing to the large hysteresis of displacement with respect to the applied voltage. The current pulse drive did not excite large vibrations by integrating the current pulses. For continuous path control, the current pulse drive was also compared with the voltage drive by open-loop or proportional integral control. The current pulse drive yielded good performance for a simple open-loop control scenario, and thus can be used for device miniaturization, because in this case no displacement sensors are needed.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.138 No.1 （2018） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 30-36 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/138/1/138_30/_article/-char/ja/