発振器型熱式マイクロ・フローセンサ

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2018/03/01

タイトル(英語): Oscillator-Type Thermal Micro Flow Sensor

著者名: 星野　敬亮（千葉工業大学），劉　健男（千葉工業大学），室　英夫（千葉工業大学）

著者名(英語): Keisuke Hoshino (Chiba Institute of Technology), Jiannan Liu (Chiba Institute of Technology), Hideo Muro (Chiba Institute of Technology)

キーワード: マイクロ・フローセンサ，熱式，SOI-MEMS，発振器，温度センサ　　micro flow sensors，thermal，SOI-MEMS，oscillator，temperature sensors

要約(英語): In recent years, miniaturization and higher performance have been increasingly required for the electronic devices in the measurement system or electronics. In order to accomplish these goals, sensors and actuators using the MEMS have been widely studied. A flow sensor is one of such MEMS sensors. There are various types of flow sensors such as an electromagnetic type, a float type, an ultrasonic type, an impeller type, or a thermal type. Among them the thermal type has the potential of fulfilling the above requirements and is easy to be produced using the MEMS technology. Based on these backgrounds the micro thermal flow sensor using SOI-MEMS technology has been extensively studied. The authors conducted a research on thermal micro flow sensor using SOI-MEMS technology which can easily be integrated with other sensors such as acceleration sensors. However, there are fluctuations in sensitivity and offset due to thermal stress and aged deterioration in a bridge circuit system including ordinary temperature sensitive resistors. In this paper, we investigated an oscillator type thermal micro flow sensor aimed at suppressing these effects by utilizing the time delay of thermal conduction.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.138 No.3 （2018）

本誌掲載ページ: 112-116 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/138/3/138_112/_article/-char/ja/