磁性薄膜の磁気歪みを利用した歪み・振動センサの開発

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2018/04/01

タイトル(英語): Development of Strain and Vibration Sensor using Magnetostriction of Magnetic Thin Film

著者名: 久保　結人（東北大学 電気通信研究所），枦　修一郎（東北大学 電気通信研究所），横井　甫（東北大学 電気通信研究所），荒井　薫（東北大学 電気通信研究所），石山　和志（東北大学 電気通信研究所）

著者名(英語): Yuito Kubo (Research Institute of Electrical Communication, Tohoku University), Shuichiro Hashi (Research Institute of Electrical Communication, Tohoku University), Hajime Yokoi (Research Institute of Electrical Communication, Tohoku University), Kaoru Ar

キーワード: 歪みセンサ，振動センサ，磁歪，逆磁歪効果，磁性薄膜　　Strain sensor，Vibration sensor，Magnetostriction，Inverse magnetostrictive effect，Magnetic thin film

要約(英語): We fabricated a strain sensor using the inverse-magnetostrictive effect of magnetoelastic thin films, and applied it for vibration sensor. The sensor element consisted of 1 turn meander-patterned molybdenum (Mo) film as conductive layer and FeSiB magnetostrictive films that laminated a part of the meander. After annealing the element, the FeSiB films of the sensor element were subject to residual stress from Mo film and Si substrate, which induced a magnetic anisotropy of the FeSiB film via magnetoelastic coupling. From the impedance change of the element under compressive strain the sensor exhibited a gauge factor of 2,160 at a carrier frequency of 150MHz under compressive strain. In addition, a phase-difference detection circuit was fabricated to evaluate the element as a vibration sensor. When an edge load of 20g was attached to the element, the maximum signal of 288mV (45mV/deg.) correspond to vibration was obtained at the mechanical resonance frequency of 20.8Hz.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.138 No.4 （2018）

本誌掲載ページ: 153-158 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/138/4/138_153/_article/-char/ja/