Resonant Accelerometers using Electrostatic Potential between the Comb Electrodes

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2018/06/01

タイトル(英語): Resonant Accelerometers using Electrostatic Potential between the Comb Electrodes

著者名: Jiannan Liu (Chiba Institute of Technology), Keisuke Hoshino (Chiba Institute of Technology), Hideo Muro (Chiba Institute of Technology)

著者名(英語): Jiannan Liu (Chiba Institute of Technology), Keisuke Hoshino (Chiba Institute of Technology), Hideo Muro (Chiba Institute of Technology)

キーワード: Resonant Sensor，Electrostatic Potential，SOI-MEMS，Comb electrode，Electrostatic drive

要約(英語): In order to realize much smaller accelerometers with still lower cost, a noble resonant accelerometer were proposed, where the proof mass is displaced by the applied acceleration in the electrostatic field between the comb electrodes, resulting in a considerable change in the resonant frequency. In our previous paper, the area of the proof mass was 1 mm square, where an auxiliary electrode was formed in a hole within the proof mass for electrostatic tuning of the silicon resonator. To miniaturize the accelerometer, prototypes with area of 750 μm square and 500 μm square were designed, and fabricated using a SOI-MEMS technology, and their fundamental characteristics were evaluated. The change in the resonant frequency under the applied acceleration of 1 G was several tens percents, which agreed well with simulation results, and the operation principle of this resonant sensor was successfully verified.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.138 No.6 （2018）

本誌掲載ページ: 226-230 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/138/6/138_226/_article/-char/ja/