3Dプリンタを用いた光放射圧に基づくMEMSモータの開発

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2018/09/01

タイトル(英語): Development of MEMS Motor using 3D Printer based on Light Radiation Pressure

著者名: 佐野　弘人（関西大学システム理工学部），新井　泰彦（関西大学システム理工学部）

著者名(英語): Hiroto Sano (Kansai University Faculty of Engineering Science), Yasuhiko Arai (Kansai University Faculty of Engineering Science)

キーワード: 3Dプリンタ，光放射圧，マイクロモータ，MEMS　　3D printer，light radiation pressure，micro-motor，MEMS

要約(英語): The development of optical motor using light radiation pressure as a power source of MEMS is reported in this paper. The light radiation pressure is a force generated by changing the momentum of light. This force has recently been applied to the industry as laser trapping technology and so on. The applicability in MEMS for the purpose of more actively using light radiation pressure is discussed by developing a novel driving source using a micro-rotor. The torque that can be produced from one rotor using the light radiation pressure is investigated under the dynamics of the optical motor by using experimental and simulation results. It is confirmed that the torque produced by light radiation pressure can drive a micro-rotor. A method of improving rotation speed is proposed. In addition, the promotion of the use of 3D printers in the MEMS field is performed.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.138 No.9 （2018）

本誌掲載ページ: 406-411 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/138/9/138_406/_article/-char/ja/