Fabrication of a Switchable Dual AFM Cantilever through a Large Deflection using Magneto-strictive Film

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2018/09/01

タイトル(英語): Fabrication of a Switchable Dual AFM Cantilever through a Large Deflection using Magneto-strictive Film

著者名: Jinseo Hong (Graduate School of Science and Engineering, Yamagata University), Kazuki Mishina (Graduate School of Science and Engineering, Yamagata University), Takashi Mineta (Graduate School of Science and Engineering, Yamagata University)

著者名(英語): Jinseo Hong (Graduate School of Science and Engineering, Yamagata University), Kazuki Mishina (Graduate School of Science and Engineering, Yamagata University), Takashi Mineta (Graduate School of Science and Engineering, Yamagata University)

キーワード: dual AFM cantilever，switchable，magneto-strictive film，FePd film，Large displacement，resonant behaviour，actuation

要約(英語): In this study, we fabricated and characterised a prototype dual atomic force microscopic cantilever with a large deflectable structure using an Fe₆₅Pd₃₅ magneto-strictive film for cantilever switching. A zigzag-shaped 5-μm-thick liquid delivering cantilever was designed to reduce its stiffness. Moreover, multiple Fe₆₅Pd₃₅ (2 μm) with Si (5 μm) beams were placed on its both sides to generate large cantilever deflections. The imaging cantilever (Fe₆₅Pd₃₅ 2 μm / Si 2 μm thick, 170 μm long) and the hollow cantilever (5 μm thick) were deflected above 1 and 2 μm, respectively, by applying 300 G magnetic flux along the longitudinal direction of the cantilever. In addition, the resonance frequencies of the imaging and hollow cantilevers were 89.2 and 65.2 kHz, respectively. The delivering cantilever showed no resonant peak when the imaging cantilever was resonating at approximately 89 kHz. Furthermore, the vibration amplitude of the delivering cantilever was within 300-500 nm when it was resonating at its resonant frequency, which was sufficiently small to avoid the contact of the cantilever tip with the sample surface as it was being deflected away from the surface by magneto-striction.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.138 No.9 （2018）

本誌掲載ページ: 412-416 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/138/9/138_412/_article/-char/ja/