超音波センサに適した極薄PTFE層を有するシリカ凝集体エレクトレットの製作と特性評価

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2018/09/01

タイトル(英語): Preparation and Characteristic Evaluation of Silica-agglomerate Electret with Ultra-thin PTFE Layer for Ultrasonic Sensor

著者名: 蔭山　健介（埼玉大学），折笠　健（埼玉大学），アハマド ザリフ アフィック ビン　ジャマルディン（埼玉大学），坂井　建宣（埼玉大学）

著者名(英語): Kensuke Kageyama (Saitama University), Takeru Orikasa (Saitama University), Ahmad Zarif Afiq Bin Jamaludin (Saitama University), Takenobu Sakai (Saitama University)

キーワード: エレクトレット，PTFE，シリカ凝集体，空中超音波，超音波センサ　　electret，PTFE，silica agglomerate，aerial ultrasound，ultrasonic sensor

要約(英語): Influence of formation of silica agglomerates on a ultra-thin fluororesin electret on the characteristics of the charge-retention and the aero-ultrasonic sensor was investigated. The ultra-thin PTFE layer (thickness was 2.8 μm) was obtained by spin-coating and silica agglomerates were formed by spraying droplets of colloidal silica. The formation of PTFE/silica agglomerate composite layer on PTFE layer resulted the larger and more flat agglomerates than the formation of single layer of silica agglomerates on the PTFE layer. The measurement of the charge retention of the obtained electrets after 24 h at RT and at 250℃ revealed that the formation of PTFE/silica-agglomerate composite layer on the ultra-thin PTFE layer enhanced the charge retention. Furthermore, the electret condenser sensor (ECS) fabricated using the silica-agglomerate electret on the ultra-thin PTFE layer exhibited the excellent sensitivity and high resonance frequency compared with conventional ECS with PFA layer (thickness was 12.5 μm).

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.138 No.9 （2018）

本誌掲載ページ: 441-447 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/138/9/138_441/_article/-char/ja/