Response Characteristics of Silicon Microring Resonator Hydrogen Gas Sensor

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2019/01/01

タイトル(英語): Response Characteristics of Silicon Microring Resonator Hydrogen Gas Sensor

著者名: Naoki Yamasaku (Yokohama National University), Sosuke Matsuura (Yokohama National University), Yoshiaki Nishijima (Yokohama National University), Taro Arakawa (Yokohama National University), Shinji Okazaki (Yokohama National University)

著者名(英語): Naoki Yamasaku (Yokohama National University), Sosuke Matsuura (Yokohama National University), Yoshiaki Nishijima (Yokohama National University), Taro Arakawa (Yokohama National University), Shinji Okazaki (Yokohama National University)

キーワード: MRR，Pt/WO3，hydrogen leakage detection，sol-gel method

要約(英語): A novel optic sensor using platinum-loaded tungsten oxide (Pt/WO3) and a silicon microring resonator for detection of hydrogen gas at room temperature was developed and tested. The sensing principle is mainly based on the resonant wavelength shift caused by the catalytic combustion reaction of hydrogen. In a previous study, it was found that Pt/WO3 film could not be deposited uniformly on the surface of the microring. To solve this problem, acetylene glycol surfactant was used and mixed with Pt/WO3 precursor solution. Electron probe microanalyzer images of the device surface showed that the Pt/WO3 layer successfully covered the target part of the microring. When this device was tested, a 580-pm resonant wavelength shift was observed after 20-min exposure to pure hydrogen gas at room temperature. When the previous device was tested under the same condition, a 160-pm resonant wavelength shift was observed, so the sensitivity (defined by the wavelength shift after 20-min exposure to sample gas) of the developed device was approximately four times larger than that of the previous one.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.139 No.1 （2019） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 2023/02/06 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/139/1/139_2/_article/-char/ja/