Fabrication and Characterization of an Arrayed Shape Memory Alloy Thick Film Actuator Device for Planar Tactile Displays

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2019/01/01

タイトル(英語): Fabrication and Characterization of an Arrayed Shape Memory Alloy Thick Film Actuator Device for Planar Tactile Displays

著者名: Hiroshi Yanatori (Graduate School of Science and Engineering, Yamagata University), Kazuki Tsuji (Graduate School of Science and Engineering, Yamagata University), Konomu Abe (Advanced Development Dept., R&D Center, Tokai Rika CO., LTD.), Kenji Iwasaki (A

著者名(英語): Hiroshi Yanatori (Graduate School of Science and Engineering, Yamagata University), Kazuki Tsuji (Graduate School of Science and Engineering, Yamagata University), Konomu Abe (Advanced Development Dept., R&D Center, Tokai Rika CO., LTD.), Kenji Iwasaki (Advanced Development Dept., R&D Center, Tokai Rika CO., LTD.), Takashi Mineta (Graduate School of Science and Engineering, Yamagata University)

キーワード: Shape memory alloy，Thick film，Tactile display，Micro-actuator array，Planer structure

要約(英語): This paper describes the fabrication and characterization of a shape memory alloy (SMA) thick film actuator array for MEMS-type tactile displays that present information to a human finger with mechanical stimulation. A planar SMA thick film actuator array (5×5 array, 1 mm pitch) is proposed as a core component of tactile displays. A prototype of the MEMS-type SMA actuator array device with planar meandering SMA actuators and Pt thin film micro-heaters was successfully fabricated from a 10 μm thick SMA flash-evaporated film through a novel fabrication processes. The basic force generation properties of the completed SMA actuator were evaluated by heating the Pt micro-heater. When the device initially deflected to 100 μm, it was able to generate 33 mN and 16 mN of force by heating with 15 mA of DC current and without heating, respectively. In the combination with a bias spring, reversible force generation and displacement were estimated to be 5 mN and 20 μm when driven with a DC current, respectively. The force generated by the SMA actuator during vibrational motion at 20-40 Hz decreased to half the force generated during static motion. However, the output force was expected to be large enough to mechanically stimulate a human finger at 20-40 Hz.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.139 No.1 （2019） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 15-20 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/139/1/139_15/_article/-char/ja/