Preparation of Nonspherical Monodisperse Polydimethylsiloxane Microparticles for Self-assembly Fabrication of Periodic Structures

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2019/06/01

タイトル(英語): Preparation of Nonspherical Monodisperse Polydimethylsiloxane Microparticles for Self-assembly Fabrication of Periodic Structures

著者名: Mizue Mizoshiri (Nagaoka University of Technology), Yuuki Iijima (Nagoya University), Seiichi Hata (Nagoya University)

著者名(英語): Mizue Mizoshiri (Nagaoka University of Technology), Yuuki Iijima (Nagoya University), Seiichi Hata (Nagoya University)

キーワード: polydimethylsiloxane (PDMS)，microparticle，self-assembly，microfabrication

要約(英語): Nonspherical monodisperse polydimethylsiloxane (PDMS) microparticles were fabricated by lithography and ultraviolet ozone (UVO) treatment for self-assembly of periodic structures. PDMS solution was poured into photoresist molds on glass substrates, whereupon it was cured at 80℃. After irradiating ultraviolet to the surface of the PDMS, remaining thin PDMS films on the molds were eliminated using ultrasonic waves. Attenuated-total-reflection Fourier-transform infrared spectra indicated that the surface of the UVO treated PDMS was changed to glass SiO2-like materials, resulting that the remaining thin PDMS films could be ultrasonically removed by fracture. The PDMS microparticles were separated from the substrates using ultrasonic waves, and microparticles of a desired shaped were formed. A suspension was prepared by mixing the PDMS microparticles in deionized water, and a droplet of the suspension was placed on a hydrophobic template substrate. The PDMS microparticles self-assembled on the substrate along the template walls, leading to PDMS microparticles being closely packed. Such PDMS microfabrication would be useful for microdevices.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.139 No.6 （2019） 特集：進化するMEMSのためのナノスケール加工技術

本誌掲載ページ: 132-136 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/139/6/139_132/_article/-char/ja/