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毛包細胞の機能を模した高感度MEMSシリコン毛デバイス

毛包細胞の機能を模した高感度MEMSシリコン毛デバイス

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カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2019/07/01

タイトル(英語): A Highly Sensitive MEMS Silicon-Hair Device Reproducing the Function of Hair Follicle

著者名: 濱本 晃輝(香川大学),寺尾 京平(香川大学),下川 房男(香川大学),高尾 英邦(香川大学)

著者名(英語): Koki Hamamoto (Kagawa University), Kyohei Terao (Kagawa University), Fusao Shimokawa (Kagawa University), Hidekuni Takao (Kagawa University)

キーワード: フォースセンサ,フィジカルセンサ,シリコン毛,表面張力,静電引力,共振駆動  force sensor,physical sensor,silicon-hair,surface tension of liquid,electrostatic attraction,resonance-drive

要約(英語): This paper reports a highly sensitive MEMS silicon-hair device with novel functions of hair follicle. Human hairy skin has peculiar receptor called hair follicle. Therefore, a highly sensitive sensor reproducing the function of hair follicle is demanded in order to quantify peculiar sense in hairy skin such as wind, static electricity, and perception of the liquid surface. The developed device in this study has fine silicon-hair with 10μm width and 5mm length. Moreover, it detects 2-axis force and 1-axis moment applied to silicon-hair by piezoresistors. The MEMS silicon-hair device has realized resolutions of 5μN axial force, 1μN shear force, and 3nN・m moment. Also, the device in this study precisely acquired surface tension close to the physical property of water and ethanol water solution. In addition, the MEMS silicon-hair device was successful in detecting 0.1μN electrostatic attraction. Resolutions of shear force and moment have been improved by tenfold using the resonance-drive of silicon-hair.

本誌: 電気学会論文誌E(センサ・マイクロマシン部門誌) Vol.139 No.7 (2019) 特集:第35回「センサ・マイクロマシンと応用システム」シンポジウム受賞論文

本誌掲載ページ: 180-185 p

原稿種別: 論文/日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/139/7/139_180/_article/-char/ja/

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