パワーデバイスにおける過電流検知用TSV構造MEMSロゴスキーコイル

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2019/08/01

タイトル(英語): MEMS Rogowski Coil with TSV Structure for Overcurrent Detection in Power Device

著者名: 渡部　善幸（山形県工業技術センター），矢作　徹（山形県工業技術センター），阿部　泰（山形県工業技術センター），村山　裕紀（山形県工業技術センター），九里　伸治（新電元工業（株）），吉田　賢一（新電元工業（株）），指田　和之（新電元工業（株）），新井　大輔（新電元工業（株）），池田　克弥（新電元工業（株））

著者名(英語): Yoshiyuki Watanabe (Yamagata Research Institute of Technology), Toru Yahagi (Yamagata Research Institute of Technology), Yutaka Abe (Yamagata Research Institute of Technology), Hiroki Murayama (Yamagata Research Institute of Technology), Shinji Kunori (Shindengen Electric Manufacturing Co., Ltd.), Kenichi Yoshida (Shindengen Electric Manufacturing Co., Ltd.), Kazuyuki Sashida (Shindengen Electric Manufacturing Co., Ltd.), Daisuke Arai (Shindengen Electric Manufacturing Co., Ltd.), Katsuya Ikeda (Shindengen Electric Manufacturing Co., Ltd.)

キーワード: MEMS，ロゴスキーコイル，電流センサ，TSV，過大電流，パワーデバイス　　MEMS，rogowski coil，current sensor，TSV，overcurrent，power devices

要約(英語): We have fabricated an MEMS Rogowski coil with TSV structure for over current detection in power device. The device size is 10×10×0.3 mm3, the number of turns of the coil is 137 turns, and the via diameter is 100 μm. In the type that allows current through the silicon substrate, the electromotive force was not stabilized and the current could not be detected. In the type in which a current flows through the center penetrating part, the electromotive force was stable. When the slew rate (di / dt) was kept constant at 10 A / μs, and the current was changed by 5 A at most up to 40 A, MEMS Rogowski coil could detect current linearly. When the slew rate was changed by 10 A / μs at most up to 100 A / μs, it was found that the MEMS Rogowski coil could detect current almost linearly following the reference sensor.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.139 No.8 （2019）

本誌掲載ページ: 238-243 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/139/8/139_238/_article/-char/ja/