標準CMOSプロセスを用いたマイクロシステム用太陽電池の設計

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2019/08/01

タイトル(英語): Design of Solar Cell for Micro System Using Standard CMOS Process

著者名: 銭林　大悟（慶應義塾大学 理工学部 電子工学科），杉浦　隆弥（慶應義塾大学 理工学部 電子工学科），中野　誠彦（慶應義塾大学 理工学部 電子工学科）

著者名(英語): Daigo Zenibayashi (Department of Electronics and Electrical Engineering, Faculty of Science and Technology, Keio University), Takaya Sugiura (Department of Electronics and Electrical Engineering, Faculty of Science and Technology, Keio University), Nobuhiko Nakano (Department of Electronics and Electrical Engineering, Faculty of Science and Technology, Keio University)

キーワード: 光センサ，標準CMOSプロセス，オンチップ太陽電池，マイクロシステム，集積回路チップ　　Optical Sensor，Standard-CMOS Process，On-chip Solar Cell，Micro system，LSI chip

要約(英語): In recent years, IoT (Internet of Things), which various "things" are connected via the Internet, attracts attention. IoT supports the automation and convenience of various activities by connecting our daily lives. Sensor networks for acquiring information by a huge number of sensor nodes therein is essential for IoT. So, challenges for the realization of this system is the size of the cost and the device. One solution to this problem is the realization of microsystem.In this paper, several methods for improving the performance of on-chip solar cells for microsystem by standard CMOS process are introduced. These are a comb-shape electrode for reducing resistances in semiconductor, reduction of the number of contacts to reduce losses at the substrate/electrode interface and diffusion layers around electrodes for suppressing the recombination velocity at electrodes. These designs improved about 40-78% compared to conventional solar cell design.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.139 No.8 （2019）

本誌掲載ページ: 252-257 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/139/8/139_252/_article/-char/ja/