個別動作型の形状記憶合金厚膜アレイ触覚ディスプレイ素子の形成

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2019/09/01

タイトル(英語): Fabrication of Tactile Display Device with Individually-driven-type Shape Memory Alloy Thick Film Actuator Array

著者名: 木村　友翼（山形大学理工学研究科），辻　一樹（山形大学理工学研究科），梁取　大（山形大学理工学研究科），阿部　喜（（株）東海理化），岩崎　健二（（株）東海理化），峯田　貴（山形大学理工学研究科）

著者名(英語): Yusuke Kimura (Graduate School of Science and Engineering, Yamagata University), Kazuki Tsuji (Graduate School of Science and Engineering, Yamagata University), Hiroshi Yanatori (Graduate School of Science and Engineering, Yamagata University), Konomu Abe (Advanced Development Dept., R&D Center, Tokai Rika CO., LTD.), Kenji Iwasaki (Advanced Development Dept., R&D Center, Tokai Rika CO., LTD.), Takashi Mineta (Graduate School of Science and Engineering, Yamagata University)

キーワード: 触覚ディスプレイ，形状記憶合金，アレイ状のアクチュエータ，個別動作，2層配線　　tactile display，shape memory alloy，actuator array，individual-actuation，double layer interconnect

要約(英語): This paper presents fabrication and characteristics of a tactile display device with individually-driven-type shape memory alloy (SMA) actuator array (5×5, 1 mm pitch, 10 μm thick) for the purpose to provide complex vibrating stimulations to the human finger skin. Each SMA actuator element in the arrayed device has Pt thin film heater (10 μm wide) for heating above the shape recovery temperature (~65℃), and individually connected Au thin film electric lines (70 μm wide). The fabrication processes of double-layered Au and Pt thin film lines with an insulator layer were newly developed, and then, the individually-driven SMA thick film actuator array was successfully fabricated. The SMA film actuator generated 17 mN force by DC electric heating (41 mW). The generated force decreased due to the poor thermal response when it was driven at frequency of 15 Hz or higher. However, similar level force generation was obtained by driving at 20 Hz with suppressed duty ratio 15% (1.1 mJ for one cycle). There was no thermal interference on neighbor SMA actuator elements during the individual driving. An SU-8 micro-structure with arrayed micro-pins and bias springs was fabricated and bonded to the SMA thick film actuator array. Using the completed device, individual vibrating motion was successfully performed.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.139 No.9 （2019） 特集：水センシングに関わるセンサ・システム技術とその応用

本誌掲載ページ: 329-334 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/139/9/139_329/_article/-char/ja/