Tactile Device Based on Piezoelectric MEMS 2nd Report: Structural Improvements

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2019/11/01

タイトル(英語): Tactile Device Based on Piezoelectric MEMS 2nd Report: Structural Improvements

著者名: Kensuke Kanda (University of Hyogo), So Toyama (University of Hyogo), Kosuke Takahara (University of Hyogo), Takayuki Fujita (University of Hyogo), Kazusuke Maenaka (University of Hyogo)

著者名(英語): Kensuke Kanda (University of Hyogo), So Toyama (University of Hyogo), Kosuke Takahara (University of Hyogo), Takayuki Fujita (University of Hyogo), Kazusuke Maenaka (University of Hyogo)

キーワード: piezoelectric MEMS，PZT，tactile device，Actuator

要約(英語): Tactile devices that provide touch sensation to humans by direct contact have been realized. A tactile device based on a piezoelectric MEMS is improved in this study. The driving voltage is lowered by using multilayer lead zirconate titanate (PZT) thin film. The lower voltage is experimentally validated by measuring the cantilever displacement in the device. The displacement per voltage becomes four times larger by using four layers of PZT thin film. In addition, the polymer supporting material is also investigated to reduce the temperature dependence of the device. By using polyimide as an alternative to conventional SU-8, not only the initial warpage but also the temperature dependence is dramatically improved. The driving test of the polyimide device reveals cantilever displacement comparable to that in conventional devices. In conclusion, structural improvements resulted in low-voltage actuation and reduced warpage of the piezoelectric MEMS tactile device.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.139 No.11 （2019）　特集：機能性材料を用いたセンサ・マイクロマシン

本誌掲載ページ: 369-374 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/139/11/139_369/_article/-char/ja/