Si薄膜被覆金ナノグレーティング構造の近赤外域光吸収スペクトル偏光依存性

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2020/04/01

タイトル(英語): Polarization Dependence of Near-infrared Absorption Spectrum of Si-deposited Gold Nano-grating Structures

著者名: 新居　直之（神戸大学大学院工学研究科機械工学専攻），上杉　晃生（神戸大学大学院工学研究科機械工学専攻），菅野　公二（神戸大学大学院工学研究科機械工学専攻），磯野　吉正（神戸大学大学院工学研究科機械工学専攻）

著者名(英語): Naoyuki Arai (Department of Mechanical Engineering, Graduate school of Engineering, Kobe University), Akio Uesugi (Department of Mechanical Engineering, Graduate school of Engineering, Kobe University), Koji Sugano (Department of Mechanical Engineering, Graduate school of Engineering, Kobe University), Yoshitada Isono (Department of Mechanical Engineering, Graduate school of Engineering, Kobe University)

キーワード: 金ナノグレーティング構造，ナノワイヤ，プラズモニクス，光学特性，近赤外光，ナローバンド　　Gold nano-grating structures，nanowire structures，plasmonics，optical property，near-infrared light，narrowband

要約(英語): For applications of plasmonic structures to high performance sensors in the near-infrared region, the structures require narrowband absorption peaks, good controllability of absorption peak position, and easy fabrication process. Multiple patterns with different absorption peaks should be integrated on the same substrate. In addition, polarization independence is desired for cost reduction and miniaturization of devices. In this study, we fabricated the Si-deposited gold nano-grating structures, the wire and concentric ring structures. Then their absorption spectra were evaluated. The peak wavelength shifted to longer wavelength with increasing the pitch of the grating structure and the thickness of Si. It was revealed that the peak was greatly shifted changing the thickness of Si. In the wire structures and the concentric ring structures, polarization dependence and polarization independence of peak absorption were observed, respectively. By using the Si-deposited gold nano-grating structures, wide control of the peak wavelength was realized in the near infrared region.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.140 No.4 （2020）

本誌掲載ページ: 72-78 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/140/4/140_72/_article/-char/ja/