Mathematical Shape Evaluation of a Concave MEMS Mirror

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2020/05/01

タイトル(英語): Mathematical Shape Evaluation of a Concave MEMS Mirror

著者名: Yuma Kitagawa (Yokogawa Electric Corporation), Yuta Suzuki (Yokogawa Electric Corporation), Shin-ichiro Tezuka (Yokogawa Electric Corporation)

著者名(英語): Yuma Kitagawa (Yokogawa Electric Corporation), Yuta Suzuki (Yokogawa Electric Corporation), Shin-ichiro Tezuka (Yokogawa Electric Corporation)

キーワード: microelectromechanical systems (MEMS)，tunable VCSEL，micro cavity，concave mirror，differential geometry，normal curvature

要約(英語): A mirror is a key component of microcavity lasers. We developed a tunable laser with a microelectromechanical system (MEMS) movable mirror and a vertical cavity surface emitting laser (VCSEL), called MEMS-VCSEL. A concave shape for the MEMS mirror is fabricated to reduce diffraction loss by applying a chemical mechanical polishing process to the Si surface of a MEMS chip. Because the shape of the cavity in VCSELs affects the beam profile or the polarization of laser light, it should be evaluated quantitatively to investigate the characteristics of the laser. In this study, we demonstrate that the concave shape measured in three dimensions complies with Euler's theorem in differential geometry at the bottom area of the concave. The principal curvatures and directions of the MEMS mirror are estimated and revealed to agree with the actual concave shape. Our quantitative evaluation helps estimate not only the principal curvatures and directions, but also the normal curvature of the concave shape in any direction. These estimations are valuable for investigating the characteristics of MEMS-VCSELs such as the mode profile and the polarization state.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.140 No.5 （2020） 特集：センサ・マイクロマシン部門総合研究会

本誌掲載ページ: 109-112 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/140/5/140_109/_article/-char/ja/