Vacancy Color Stress Sensing with Embedded Diamond Particles on Si Micro-cantilevers

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2020/09/01

タイトル(英語): Vacancy Color Stress Sensing with Embedded Diamond Particles on Si Micro-cantilevers

著者名: Masaya Toda (Graduate School of Engineering, Tohoku University), Akhtar M Shahrukh (Graduate School of Engineering, Tohoku University), Takahito Ono (Graduate School of Engineering, Tohoku University)

著者名(英語): Masaya Toda (Graduate School of Engineering, Tohoku University), Akhtar M Shahrukh (Graduate School of Engineering, Tohoku University), Takahito Ono (Graduate School of Engineering, Tohoku University)

キーワード: nitrogen vacancy color center，nano-diamond，stress sensing，ESR

要約(英語): Monitoring a peak shift in the photoluminescence (PL) spectrum of nitrogen vacancy (NV) with the embedded nano-diamonds (NDs) indicates the stress change on the Si micro-cantilever resonator. There is a clear peak splitting under static magnet field, and showing the peak shift by applied periodic compressive and tensile stresses. The NDs have been simply embedded on the Si micro-cantilever by SiO2 deposition. Applying the mechanical vibration of the cantilever, the light intensity of photoluminescence of NV color centers (NVC) in the individual ND have been monitored under a magnet field. Indicating a specific orientation, one peak is sensitive to the vibration stress showing the frequency shifts under the influence of static magnetic field (3.4 mT) at 2.86 GHz. It is realized that NV color centers need to be at one orientation to clearly observe the stress effect on ESR spectrum, which can be done by detection in the crystal of NDs. This technique indicates the next possibility for measuring a vector stress optomechanically using such embedded NDs by SiO2 film.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.140 No.9 （2020） 特集：将来のIoTに向けたセンサ・センシングシステム技術

本誌掲載ページ: 222-227 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/140/9/140_222/_article/-char/ja/