StructureーBased Huge HardーSpring Torsional Resonator Coupled with Thermal Bending for Infrared Sensor

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2020/09/01

タイトル(英語): StructureーBased Huge HardーSpring Torsional Resonator Coupled with Thermal Bending for Infrared Sensor

著者名: Masaki Okamoto (Department of Advanced Science and Technology, Toyota Technological Institute), Tomoya Hatagaki (Department of Advanced Science and Technology, Toyota Technological Institute), Shinya Kumagai (Meijo University), Minoru Sasaki (Department o

著者名(英語): Masaki Okamoto (Department of Advanced Science and Technology, Toyota Technological Institute), Tomoya Hatagaki (Department of Advanced Science and Technology, Toyota Technological Institute), Shinya Kumagai (Meijo University), Minoru Sasaki (Department of Advanced Science and Technology, Toyota Technological Institute)

キーワード: thin film torsional resonator,huge hardーspring effectthermal bendinginfrared sensor

要約(英語): A temperatureーsensitive electrostatic resonator is realized which hardens the torsional spring being coupled with the static thermal bending. The principle for increasing the natural frequency mainly relates with the structure. The realized changing ratio reached to +3790 ppm/K against the frequency at room temperature. This is more than 10ーtimes larger in magnitude and opposite in direction compared to the temperature dependence of the material used indicating the high sensitivity for the infrared sensor.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.140 No.9 （2020） 特集：将来のIoTに向けたセンサ・センシングシステム技術

本誌掲載ページ: 240-245 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/140/9/140_240/_article/-char/ja/