エラストマ封止カンチレバー型触覚センサの検出エリア評価

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2020/10/01

タイトル(英語): Detection Area Evaluation of Tactile Sensor Using Microcantilever Embedded in Elastomer

著者名: 阿部　由杜（新潟大学大学院自然科学研究科），菅　史賢（新潟大学大学院自然科学研究科），安部　隆（新潟大学大学院自然科学研究科），野間　春生（立命館大学情報理工学部），寒川　雅之（新潟大学大学院自然科学研究科）

著者名(英語): Yuto Abe (Graduate School of Science and Technology, Niigata University), Fumitoshi Suga (Graduate School of Science and Technology, Niigata University), Takashi Abe (Graduate School of Science and Technology, Niigata University), Haruo Noma (College of Information Science and Engineering, Ritsumeikan University), Masayuki Sohgawa (Graduate School of Science and Technology, Niigata University)

キーワード: MEMS，触覚センサ，マイクロカンチレバー，エラストマ，検知範囲　MEMS，tactile sensor，cantilever，elastomer，detection area

要約(英語): We fabricated a MEMS tactile sensor which can detect a wide area by sealing a cantilever with a 4.2 mm thick and 50 mm square elastomer. To evaluate the detection range of this sensor, dependence of response to application of normal force on the distance from the cantilever was evaluated. As a result, it is shown that the cantilever can detect force application up to around 5 mm away from it. In addition, it is shown that the sensitivity to force applied just above the cantilever becomes small because the lateral and vertical deformations of the elastomer cancel each other. On the other hand, it is found that the sensitivity monotonically decreases with distance from the cantilever in the cross direction. Therefore, it is considered that this sensor can estimate the position of force application in 2-dimensional surface by using several differently oriented cantilevers.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.140 No.10 （2020）

本誌掲載ページ: 272-277 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/140/10/140_272/_article/-char/ja/