An Impedancemetric Micro NO2 Sensor Using Oxide and Solid-Electrolyte Thin-Films

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2020/11/01

タイトル(英語): An Impedancemetric Micro NO2 Sensor Using Oxide and Solid-Electrolyte Thin-Films

著者名: Tsuyoshi Sakai (Department of Applied Chemistry, Kyushu Institute of Technology), Satoko Takase (Department of Applied Chemistry, Kyushu Institute of Technology), Youichi Shimizu (Department of Applied Chemistry, Kyushu Institute of Technology)

著者名(英語): Tsuyoshi Sakai (Department of Applied Chemistry, Kyushu Institute of Technology), Satoko Takase (Department of Applied Chemistry, Kyushu Institute of Technology), Youichi Shimizu (Department of Applied Chemistry, Kyushu Institute of Technology)

キーワード: NOx sensor，thin-film，solid electrolyte，perovskite-type oxide，La0.8K0.2MnO3，impedancemetric

要約(英語): A solid-state micro NOX sensor was tried to make using a solid-electrolyte Li1.5Al0.5Ti1.5(PO4)3 (LATP) thin-film as an impedance transducer and a perovskite-type oxide thin-film as a receptor, respectively. The LATP and perovskite-type La0.8K0.2MnO3 oxide thin-films were prepared by wet-chemical methods at 650-800℃. The La0.8K0.2MnO3/LATP thin-film device could work as a good impedancemetric NO2 sensor at 300-500℃.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.140 No.11 （2020） 特集：Society 5.0を支えるケミカルセンサ

本誌掲載ページ: 305-308 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/140/11/140_305/_article/-char/ja/