薄膜磁気インピーダンスセンサの強磁場中における特性と磁区変化

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2020/12/01

タイトル(英語): Property and Magnetic Domain of Thin Film MI Sensor with Subjecting to Normal Magnetic Field

著者名: 中居　倫夫（宮城県産業技術総合センター）

著者名(英語): Tomoo Nakai (Industrial Technology Institute, Miyagi Prefectural Government)

キーワード: 薄膜，磁気インピーダンスセンサ，法線方向磁場，高周波，非破壊検査，製造工程　　thin-film，magneto-impedance sensor，normal magnetic field，high frequency，nondestructive inspection，manufacturing process

要約(英語): A thin-film magnetic field sensor is useful for detecting foreign matters and nanoparticles included in industrial and medical products. It can detect a small piece of tool steel chipping or breakage inside the products nondestructively. An inspection of all items in the manufacturing process is desirable for the smart manufacturing system. A previous study proposed a sensing system in which a thin-film magneto-impedance sensor was set in a strong normal magnetic field and detected the foreign matters at the same time as magnetization. In this paper, an impedance property of a thin-film magneto-impedance sensor and magnetic domain of it is investigated within up to 0.35 T normal magnetic fields against substrate plane for the purpose of improving performances of the proposed sensing system. A verification of sensitivity of the sensor was also carried out subjecting to 0.3 T normal magnetic fields.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.140 No.12 （2020）

本誌掲載ページ: 343-348 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/140/12/140_343/_article/-char/ja/