島状金薄膜におけるプラズモン共鳴を用いた光学的感圧膜の開発

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2020/12/01

タイトル(英語): Development of an Optical Pressure-sensitive Membrane based on Plasmon Resonance on a Gold Island Film

著者名: 竹林　永人（東京農工大学），池沢　聡（東京農工大学），岩見　健太郎（東京農工大学）

著者名(英語): Nagato Takebayashi (Tokyo University of Agriculture and Technology), Satoshi Ikezawa (Tokyo University of Agriculture and Technology), Kentaro Iwami (Tokyo University of Agriculture and Technology)

キーワード: 感圧膜，プラズモン共鳴，PDMS，金島状膜，ナノギャップ　　pressure sensitive membrane，plasmon resonance，PDMS，gold island film，nano gap

要約(英語): In this paper, an optical pressure-sensitive membrane based on plasmon resonance absorption has been designed, fabricated, and demonstrated. The membrane utilizes plasmon resonance on a gold island film embedded in a polydimethylsiloxane (PDMS) layers, and the shift of the resonant wavelength was used as an indicator of pressure-induced strain of the membrane. The membrane with total thickness of 100 μm were prepared with spin-coating of PDMS and vacuum evaporation of gold island film with the nominal thickness of 10 nm. Pressure sensitivity of the fabricated membrane was demonstrated from the measurement of absorbance spectra and the maximum sensitivity of 0.35 nm/kPa was achieved by applying pressure up to 35 kPa. Plasmon resonance mode attributing to the pressure sensitivity has been analyzed through comparison between electromagnetic simulation and membrane stretching test. From the stretching test, red shifts of the resonant wavelength were obtained for both parallel and perpendicular polarizations to the tensile direction with the sensitivities of 0.372 and 0.134 nm/%, respectively. From the electromagnetic simulation, these red shifts can be attributed to both gap-mode and deformation-mode resonances of the gold island film.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.140 No.12 （2020）

本誌掲載ページ: 374-379 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/140/12/140_374/_article/-char/ja/