バイオセンシングを指向したフィルタフリー蛍光センサの近紫外光検出能の向上

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2021/03/01

タイトル(英語): Performance Improvement of Filter-Free Fluorescence Sensor in Near-Ultraviolet Region Aiming for Biosensing Application

著者名: 野田　俊彦（豊橋技術科学大学），手島　拓哉（豊橋技術科学大学），崔 　容俊（豊橋技術科学大学），飛沢　健（豊橋技術科学大学），高橋　一浩（豊橋技術科学大学），石井　仁（豊橋技術科学大学），澤田　和明（豊橋技術科学大学）

著者名(英語): Toshihiko Noda (Toyohashi University of Technology), Takuya Teshima (Toyohashi University of Technology), Yong-Joon Choi (Toyohashi University of Technology), Takeshi Hizawa (Toyohashi University of Technology), Kazuhiro Takahashi (Toyohashi University of

キーワード: 蛍光計測，フィルタフリー蛍光センサ，フォトゲート，透明電極　　fluorescence measurement，filter-free fluorescence sensor，photogate，transparent electrode

要約(英語): Detection performance of filter-free fluorescence sensors in the near-ultraviolet region has improved in this study. Thinner polycrystalline-Si film and indium tin oxide film were introduced as materials of photogate which required high transparency for sensitive measurement. Optical property of the photogate material was evaluated. Filter-free fluorescence sensors which have photogates with high optical transmittance were fabricated based on standard CMOS process. As results of a demonstration which emulates separate detection of excitation light and fluorescence by the fabricated filter-free sensors, detection performance in the near-ultraviolet region has improved a hundredfold compared to a previous sensor.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.141 No.3 （2021） 特集：医用生体エレクトロニクスの新展開

本誌掲載ページ: 77-82 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/141/3/141_77/_article/-char/ja/