SU-8ナノ加工を用いた光操作型ナノニードルの開発

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2021/06/01

タイトル(英語): Development of Optical-Driven Nanoneedles Using SU-8 Nanofabrication

著者名: 原田　雅彦（香川大学），高尾　英邦（香川大学），下川　房男（香川大学），寺尾　京平（香川大学）

著者名(英語): Masahiko Harada (Kagawa University), Hidekuni Takao (Kagawa University), Fusao Simokawa (Kagawa University), Kyohei Terao (Kagawa University)

キーワード: ナノニードル，光ピンセット，細胞操作，分子操作，SU-8　　nanoneedle，optical tweezers，cell manipulation，molecular manipulation，SU-8

要約(英語): We developed an optical-driven nanoneedle that is operated in aqueous solution by 2 focused laser beams. A nanoneedle tool consists of 2 micrometer-sized structures for optical trapping and a nanoneedle having 200 nm width and 20 μm length. Nanoneedle tools are fabricated with single UV lithography of SU-8 photoresist with highly scalable manner. We evaluated the conditions of the lithography processes: rinse, hardbake and PEB that determine the shape of the nanoneedles and recovery rate. We demonstrated the trapping of a nanoneedle tool to verify the manipulation of the position and the orientation. Nanoneedle tools have an advantage in the use of closed microchanells, which can lead to the applications including delivery and extraction of substances inside single cells and pinpoint molecular processing of biomolecules. In this paper, we report on the fabrication process of the nanoneedle tools and the demonstration of the manipulation.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.141 No.6 （2021）

本誌掲載ページ: 173-178 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/141/6/141_173/_article/-char/ja/