反力可変受動形触覚ディスプレイ用アクチュエータの作製と評価

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2021/09/01

タイトル(英語): Fabrication and Evaluation of Actuators for Reaction Force Variable Passive-type Tactile Displays

著者名: 南原　圭汰（名古屋大学），山崎　貴大（名古屋大学），岡　智絵美（名古屋大学），秦　誠一（名古屋大学），櫻井　淳平（名古屋大学）

著者名(英語): Keita Nambara (Nagoya University), Takahiro Yamazaki (Nagoya University), Chiemi Oka (Nagoya University), Seiichi Hata (Nagoya University), Junpei Sakurai (Nagoya University)

キーワード: 触覚ディスプレイ，形状記憶合金，薄膜金属ガラス，マイクロアクチュエータ，3次元構造，微細加工　　tactile display，shape memory alloy，thin film metallic glass，microactuator，three-dimensional structure，micro forming

要約(英語): In this paper, we report on the fabrication and evaluation of actuator for reaction force variable passive-type tactile display using high formable Ti-Ni-Cu shape memory alloy. This actuator is driven by the superelastic effect and superior in force expression, responsiveness, and miniaturization compared to conventional tactile displays using shape memory alloys. This actuator was fabricated in a convex shape by utilizing a viscous flow of Ti-Ni-Cu metallic glass. After crystallization, the metallic glass was changed to the shape memory alloy. In this manner, we successfully acquired the desired convex cross structure with a height of 123 μm at the center of cross. Additionally, while pushing 100 μm, we successfully varied the reaction force ranged from 40 to 80 mN, necessary to deform the skin and electrical resistance linearly by controlling the temperature. From these results, we showed that the actuator of this study can be used as tactile display that can express desired hardness and softness by temperature control. We also showed the possibility that the temperature of each actuator can be controlled individually by electrical heating using the linear relationship between temperature and electrical resistance.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.141 No.9 （2021） 特集：新素材を用いたセンサ・アクチュエータ技術とその応用

本誌掲載ページ: 304-309 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/141/9/141_304/_article/-char/ja/