近赤外光吸収体を有する静電型マイクロ振動子デバイスを用いた水の分光測定

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2021/09/01

タイトル(英語): Spectroscopic Measurement of Water Using an Electrostatic Transducer with Near-infrared Absorber

著者名: 鈴木　隆正（神戸大学大学院工学研究科機械工学専攻），中藤　康太（神戸大学大学院工学研究科機械工学専攻），上杉　晃生（神戸大学大学院工学研究科機械工学専攻），菅野　公二（神戸大学大学院工学研究科機械工学専攻），磯野　吉正（神戸大学大学院工学研究科機械工学専攻）

著者名(英語): Takamasa Suzuki (Department of Mechanical Engineering, Graduate school of Engineering, Kobe University), Kota Nakafuji (Department of Mechanical Engineering, Graduate school of Engineering, Kobe University), Akio Uesugi (Department of Mechanical Engineeri

キーワード: MEMS振動子，光センサ，近赤外光，プラズモン共鳴，分光分析　　MEMS resonator，optical sensor，near-infrared light，plasmonic resonance，spectroscopy

要約(英語): The widespread of near-infrared spectroscopes in the consumer field is expected to create new demand, such as the detections of fruit and vegetable rot and the easy measurement of the amount of water in the skin. Conventional cooled photodiodes using compound semiconductor materials such as InGaAs have problems with cost reduction and miniaturization. Therefore, we proposed an electrostatic Si microresonator device for the realization of a near-infrared optical sensor. This device measures the resonance frequency shift caused by the thermal stress generated in the resonator due to light absorption depending on the light intensity. The purpose of this study is to apply the device to near-infrared spectroscopy of water as a photodetector. We proposed an evaluation method based on a theoretical equation and confirmed that the device could detect the near-infrared absorption spectrum of water. The measurement results of the developed device matched well with that of the commercially available photodiode intensity sensor. In the future, it is expected that a compact near-infrared spectrometer with high sensitivity and low cost will be realized by arranging devices that integrate absorbers with different wavelength dependencies.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.141 No.9 （2021） 特集：新素材を用いたセンサ・アクチュエータ技術とその応用

本誌掲載ページ: 321-326 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/141/9/141_321/_article/-char/ja/