脂質二分子膜センサのための埋植チップ上SU-8マイクロチャネル直接形成法の開発

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2021/10/01

タイトル(英語): Direct Fabrication of SU-8 Microchannel across an Embedded Chip for Potentiometric Bilayer Lipid Membrane Sensor

著者名: 分部　寛道（東北大学大学院 医工学研究科），福島　誉史（東北大学大学院 工学研究科），田中　徹（東北大学大学院 医工学研究科／東北大学大学院 工学研究科）

著者名(英語): Hiromichi Wakebe (Department of Biomedical Engineering, Graduate School of Biomedical Engineering, Tohoku University), Takafumi Fukushima (Department of Mechanical Systems Engineering, Graduate School of Engineering, Tohoku University), Tetsu Tanaka (Depa

キーワード: ラボオンチップ，マイクロ流体デバイス，チップ-キャリア インテグレーション，イオン感応性電界効果トランジスタ (ISFET)，SU-8，BLM lab-on-a-chip，microfluidics，chip-in-carrier integration，ion-sensitive field-effect transistor (ISFET)，SU-8，BLM

要約(英語): Membrane proteins play a critically important role, especially in molecular recognition and cellular transport processes, which makes them the most prevalent drug targets and also to be a good sensing element for biosensing applications. However, the skill-dependent and manual fashion to form bilayer lipid membranes (BLMs) has limited their use for application purposes. Here, we introduce a fabrication technique of SU-8 microchannel suitable for microfluidic-based BLM formation and show a preliminary step of our ISFET-based BLM sensor. Making notches on the corners of a rectangular through-wafer hole etched in a silicon carrier substrate reduced the gap width between an embedded chip and the carrier as close as possible, leading to the gap depth of ～4 μm. SU-8 microchannel on the chip-carrier assembly was directly fabricated by UV exposure through a bonded quartz lid and developing SU-8 through the fluidic ports drilled in the lid, without needing a sealing process typically causes an alignment mismatch or void formation. Finally, the capability to form BLMs was tested and proven by the successfully encapsulated fluorescent dye in microwells fabricated on the embedded chip. This paper is the first report of the successful formation of BLMs on a chip-in-carrier assembly by the microfluidic method.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.141 No.10 （2021）

本誌掲載ページ: 327-335 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/141/10/141_327/_article/-char/ja/