Frequency Trimming Method for a Disk Resonator Using Flexural Rigidity

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2021/12/01

タイトル(英語): Frequency Trimming Method for a Disk Resonator Using Flexural Rigidity

著者名: Hamza Abdelli (Graduate School of Engineering, Tohoku University), Takashiro Tsukamoto (Graduate School of Engineering, Tohoku University), Shuji Tanaka (Graduate School of Engineering, Tohoku University)

著者名(英語): Hamza Abdelli (Graduate School of Engineering, Tohoku University), Takashiro Tsukamoto (Graduate School of Engineering, Tohoku University), Shuji Tanaka (Graduate School of Engineering, Tohoku University)

キーワード: frequency trimming，quality factor trimming，rate integrating gyroscope，FM gyroscope，CW/CCW-modes

要約(英語): This paper reports a new method for frequency trimming that has a low effect on the quality factor of a multi-ring disk resonator. The method relies on altering the flexural rigidity of the resonator while preserving the thermal time constant. Perforations that have a small effect on the resonant frequency were added to the core and periphery of the rings of a multi-ring disk resonator. The perforations at the core of the rings reduce the effect of thermal dissipation. Therefore, after trimming the peripheral perforations, the resonant frequency changes according to the number of cut perforations, while the Q-factor remains slightly unaffected. Trimming is straightforward and involves just removing a small volume at the connections of the peripheral perforations at the rings.Using numerical analysis, it was demonstrated that by applying this method, the frequency could be trimmed as much as 18.83%, while the Q-factor change was as small as 0.27%.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.141 No.12 （2021）

本誌掲載ページ: 402-408 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/141/12/141_402/_article/-char/ja/