Cr-Nひずみセンサ薄膜の大きな横感度と力センサ応用

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2021/12/01

タイトル(英語): Large Transverse Sensitivity and Force Sensor Application of Strain Sensitive Cr-N Thin Films

著者名: 丹羽　英二（（公財）電磁材料研究所）

著者名(英語): Eiji Niwa (Research Institute for Electromagnetic Materials)

キーワード: Cr-N，感歪薄膜，ひずみセンサ，横感度，力センサ　　Cr-N，strain sensitive thin film，strain sensor，transverse sensitivity，force sensor

要約(英語): A Cr-N alloy thin film shows a gauge factor of about 10 and a temperature coefficient of resistivity of about zero, which is expected as a new strain gauge material in the next generation. In this study, a transverse sensitivity of the Cr-N thin films and their force sensor application has been investigated. The author has found out that the films showed almost the same large sensitivity as their axial or longitudinal sensitivity when they were arranged in the direction perpendicular to the strain, and utilization of the large transverse sensitivity made possible high positional resolution on several types of physical sensors.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.141 No.12 （2021）

本誌掲載ページ: 409-416 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/141/12/141_409/_article/-char/ja/