静電駆動カンチレバーを用いたMEMS自励発振子

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2023/04/01

タイトル(英語): Self-excited MEMS Oscillator using an Electrostatic Cantilever

著者名: 三田　信（宇宙航空研究開発機構 宇宙科学研究所），年吉　洋（東京大学 生産技術研究所）

著者名(英語): Makoto Mita (Institute of Space and Astronautical Science, The Japan Aerospace Exploration Agency), Hiroshi Toshiyoshi (Institute of Industrial Science, The University of Tokyo)

キーワード: MEMS，カンチレバー，静電駆動，振動子，自励発振　　MEMS，cantilever，electrostatic drive，oscillator，self-excited oscillation

要約(英語): In this paper, we propose a new use of an electrostatic MEMS cantilever structure as a voltage-controlled oscillator (VCO). A cantilever made of plated gold is accompanied with a drive electrode to turn on the contact switch upon voltage application. The electrical interconnection is arranged to discharge the cantilever when it is brought into contact with the switch, thereby promptly losing the electrostatic force and opening the contact switch again. As a result, the electrostatic cantilever spontaneously repeats the electrostatic pull-in and release at a frequency determined by the DC level of the applied voltage. A metallic cantilever of 500 μm long, 8 μm wide, and 12 μm thick is experimentally confirmed to work as an VCO in the frequency range between 8.4 kHz and 10.7 kHz controlled by the DC voltage between 160V and 180V.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.143 No.4 （2023）

本誌掲載ページ: 55-61 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/143/4/143_55/_article/-char/ja/