レーザパターニングを用いたエレクトレット超音波センサの製作と特性評価

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2023/06/01

タイトル(英語): Fabrication and Characteristics of Electret Ultrasonic-Sensor using Laser Patterning

著者名: 小林　駆（埼玉大学），川田　良暁（埼玉大学），蔭山　健介（埼玉大学）

著者名(英語): Kakeru Kobayashi (Saitama University), Yoshiaki Kawada (Saitama University), Kensuke Kageyama (Saitama University)

キーワード: エレクトレット，超音波センサ，レーザアブレーション，PTFE，レーザパターニング　　electret，ultrasonic sensor，laser ablation，PTFE，laser patterning

要約(英語): In this study, in an electret capacitor sensor (ECS), which is an electromechanical exchange device consisting of an electret sandwiched between two electrodes, ridges as spacers and grooves as gaps were formed in the PTFE layer of the insulating electrode by laser ablation. The ECSs were then fabricated using PTFE electrets, and the charge retention and airborne ultrasonic wave transmitting and receiving characteristics were investigated. The charge retention characteristics of the ECS with laser-patterned insulating electrodes were slightly lower than those of the silica-aggregate electret. as the thickness of the insulating layer increased or the groove width decreased, the transmitting and receiving sensitivity increased significantly and then peaked and degraded at the measurements of transmitting and receiving. The ECS with the highest peak sensitivity obtained by laser patterning had a bandwidth comparable to that of the conventional ECS with silica aggregate electret, but the peak sensitivity was improved by up to 8 dB. Therefore, laser patterning could contribute to the improvement of ECS performance.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.143 No.6 （2023）

本誌掲載ページ: 102-109 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/143/6/143_102/_article/-char/ja/