モノリシック集積コアシェルSiナノワイヤ架橋構造の熱起電力評価

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2023/07/01

タイトル(英語): Evaluation of Thermoelectric Voltage of Monolithically-Integrated Core-Shell Si Nanowire Bridges

著者名: 上杉　晃生（神戸大学大学院工学研究科機械工学専攻），西依　脩祐（神戸大学大学院工学研究科機械工学専攻），菅野　公二（神戸大学大学院工学研究科機械工学専攻），磯野　吉正（神戸大学大学院工学研究科機械工学専攻）

著者名(英語): Akio Uesugi (Department of Mechanical Engineering, Graduate School of Engineering, Kobe University), Shusuke Nishiyori (Department of Mechanical Engineering, Graduate School of Engineering, Kobe University), Koji Sugano (Department of Mechanical Engineering, Graduate School of Engineering, Kobe University), Yoshitada Isono (Department of Mechanical Engineering, Graduate School of Engineering, Kobe University)

キーワード: シリコンナノワイヤ，コアシェル半導体，熱電変換，モノリシック集積，ゼーベック係数　　silicon nanowire，core-shell semiconductor，thermoelectric generation，monolithic integration，seebeck coefficient

要約(英語): In order to clarify an effect of core-shell structuring on the thermoelectric properties of silicon nanowires (SiNWs), a new evaluation device with monolithic integration of bottom-up-grown SiNWs was developed, and Al2O3-shell-coated p-type SiNWs were evaluated. In fabrication, SiNWs bridge structures were successfully formed with a high yield of 61% on desired local region, by employing VLS processes combined with surface nanoholes formation. Evaluated resistivity and Seebeck coefficient of the core-shell SiNW bridges were 7.6 Ω・cm and 0.61 mV/K, respectively. The Seebeck coefficient was compared with those of p-type bulk and nano Si structures to discuss effect of core-shell structuring.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.143 No.7 （2023） 特集：第39回「センサ・マイクロマシンと応用システム」シンポジウム受賞論文

本誌掲載ページ: 185-191 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/143/7/143_185/_article/-char/ja/