金属ダイアフラム型圧力および力覚センサの小型高耐荷重化に向けたCr-N薄膜の横感度利用

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2023/08/01

タイトル(英語): Utilization of Transverse Sensitivity on Cr-N Thin Films for Miniaturized and Higher Withstanding Load Metal Diaphragm Type Pressure and Force Sensors

著者名: 丹羽　英二（（公財）電磁材料研究所）

著者名(英語): Eiji Niwa (Research Institute for Electromagnetic Materials)

キーワード: 圧力センサ，力覚センサ，Cr-N薄膜，横感度，ダイアフラム，ひずみセンサ　　pressure sensor，force sensor，Cr-N thin film，transverse sensitivity，diaphragm，strain sensor

要約(英語): The Cr-N thin films which are strain sensor material show large gauge factor about not only a longitudinal sensitivity but also a transverse sensitivity. Arranging the film in the perpendicular direction to a strain improves a positional resolution for the strain sensing. In this study, diaphragm type structure for pressure sensor and force sensor has been evaluated by structure analysis, considering arranging the Cr-N thin films to the circumferential direction of the diaphragm. As a result, it was confirmed that the two-sorts of strains along a radial direction and a circumferential direction were generated on the diaphragm. And placing the sensor film in the circumferential direction at the position where the two-sorts of strains show the same sign and the maximum was thought to enlarge the output and to be able to narrow the barrier membrane. Therefore, it was suggested that higher withstanding load and miniaturization of pressure sensor and force sensor consisting of the diaphragm type structure were enabled by arranging the Cr-N thin films to the circumferential direction of the diaphragm.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.143 No.8 （2023）

本誌掲載ページ: 211-218 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/143/8/143_211/_article/-char/ja/