Fabrication and Evaluation of Thin Gaps for Direct Electrification

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2023/08/01

タイトル(英語): Fabrication and Evaluation of Thin Gaps for Direct Electrification

著者名: Jian Lu (National Institute of Advanced Industrial Science and Technology (AIST)), Lan Zhang (National Institute of Advanced Industrial Science and Technology (AIST)), Lars M. Andersson (GCE Institute Inc.), Hiroshi Goto (GCE Institute Inc.)

著者名(英語): Jian Lu (National Institute of Advanced Industrial Science and Technology (AIST)), Lan Zhang (National Institute of Advanced Industrial Science and Technology (AIST)), Lars M. Andersson (GCE Institute Inc.), Hiroshi Goto (GCE Institute Inc.)

キーワード: solid gap，interdigitated electrode gap，parallel plate electrode gap，work function，nanofluids，direct electrification

要約(英語): Direct electrification from low-grade heat is becoming a research focus since those devices are simpler and less bulky in design and package. In our previous studies, we demonstrated a continuous current flow by filling a nanofluids consisting of dodecanethiol coated Au nanoparticles of 3-5 nm in diameter into an inter-electrode gap. Experiments showed that the gap thickness influences the performance of the device and theoretical analysis can relate this to interactions between the nanoparticles and strength variations of the electrical field. In this paper, we report on our efforts on design, fabrication, and evaluation of two types of gaps between metal electrodes of different work functions for the investigation of device performances as well as the operational mechanism. The merits, achievements, as well as process compatibilities of each design will be presented and discussed. The efforts and the results of this work may offer practice applicable nanomanufacturing approaches to fabricating submicron gaps for many other potential applications as well.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.143 No.8 （2023）

本誌掲載ページ: 225-230 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/143/8/143_225/_article/-char/ja/