SnO2ガスセンサの低キャリア密度化および薄膜化による感度向上
SnO2ガスセンサの低キャリア密度化および薄膜化による感度向上
カテゴリ: 論文誌(論文単位)
グループ名: 【E】センサ・マイクロマシン部門
発行日: 2023/11/01
タイトル(英語): Improvement of Gas Sensitivity by Lowering Carrier Density and Thinning Film Thickness of SnO2 Gas Sensor
著者名: 安藤 毅(千葉工業大学),西科 直哉(東京電機大学大学院 工学研究科 電気電子工学専攻)
著者名(英語): Ki Ando (Department of Electrical and Electronic Engineering, Chiba Institute of Technology), Naoya Nishina (Department of Electrical and Electronic Engineering, Graduate School of Engineering, Tokyo Denki University)
キーワード: ガスセンサ,酸化錫,電子密度,膜厚,水素センサ,ガス感度 gas sensor,tin dioxide,electron densities,film thickness,hydrogen sensor,gas sensitivity
要約(英語): In this study, we investigated dependence of carrier density and film thickness on H2 gas sensitivity using tin dioxide (SnO2) films deposited by RF magnetron sputtering. Our aim is fabricating a gas sensor that can detect ppb-level gas concentrations for health care applications. It had been reported that lower carrier density and thinner film thickness contributed improving sensitivity of a gas sensor. We balanced lower carrier density and thinner film thickness by using a sapphire substrate for depositing tin oxide in addition to annealing treatment to tin oxide films. In the result, we clarified that thinning film thickness of tin dioxide affected on improving its gas sensitivity more significantly than lowering carrier density.
本誌: 電気学会論文誌E(センサ・マイクロマシン部門誌) Vol.143 No.11 (2023) 特集:匂い・味に関するセンシングおよび提示技術
本誌掲載ページ: 344-350 p
原稿種別: 論文/日本語
電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/143/11/143_344/_article/-char/ja/
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