α-Fe2O3を感湿材料に用いた湿度センサの検討

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2023/11/01

タイトル(英語): Study of Humidity Sensor using α-Fe2O3 as a Humidity-sensitive Material

著者名: 内藤　光佑（金沢工業大学やつかほリサーチキャンパス），佐々木　恭平（金沢工業大学やつかほリサーチキャンパス），池永　訓昭（金沢工業大学やつかほリサーチキャンパス）

著者名(英語): Kosuke Naito (Yatsukaho Research Campus, Kanazawa Institute of Technology), Kyohei Sasaki (Yatsukaho Research Campus, Kanazawa Institute of Technology), Noriaki Ikenaga (Yatsukaho Research Campus, Kanazawa Institute of Technology)

キーワード: 感湿材料，湿度センサ，酸化鉄薄膜　　humidity-sensitive materials，humidity sensor，iron oxide thin film

要約(英語): In this study, iron oxide thin films are prepared under various heat treatment conditions, and their crystal structures and moisture-sensitive characteristics were evaluated to clarify the usefulness of iron oxide thin films as humidity-sensitive materials for humidity sensors. In addition, the possibility of a humidity sensor with a wide dynamic range was investigated by evaluating the relationship between the film thickness of the iron oxide thin film, the electrode width of the device, and the humidity-sensitive characteristics. As a result, it was found that the crystal structure of α-Fe2O3 exhibits relatively good humidity sensitivity compared to other crystal structures, and that the sensitivity to humidity can be adjusted by appropriately selecting the electrode width and film thickness of the device. Therefore, the α-Fe2O3 thin film may be useful as a moisture-sensitive material for wide dynamic range humidity sensors by appropriately adjusting the film thickness and electrode width.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.143 No.11 （2023） 特集：匂い・味に関するセンシングおよび提示技術

本誌掲載ページ: 351-356 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/143/11/143_351/_article/-char/ja/