Titanium Blade with Jagged Micro-scale Structure Fabricated via Electrolytic Etching

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2024/01/01

タイトル(英語): Titanium Blade with Jagged Micro-scale Structure Fabricated via Electrolytic Etching

著者名: Masamune Kurita (Graduate School of Science and Technology, Niigata University), Yuki Takizawa (Graduate School of Science and Technology, Niigata University), Masayuki Sohgawa (Graduate School of Science and Technology, Niigata University), Takashi Abe (

著者名(英語): Masamune Kurita (Graduate School of Science and Technology, Niigata University), Yuki Takizawa (Graduate School of Science and Technology, Niigata University), Masayuki Sohgawa (Graduate School of Science and Technology, Niigata University), Takashi Abe (Graduate School of Science and Technology, Niigata University)

キーワード: micro knife，micro surgical scalpel，electrolytic etching，titanium，RIE

要約(英語): This study fabricated and evaluated a Ti blade with a jagged microstructure. The blades were fabricated using photolithography and electrolytic etching. A strongly sharpened edge obtained via undercut etching was fabricated by patterning a thin Au film on the front side of a Ti plate prior to electrolytic etching. The increased undercut length was attributed to an increase in the electric field at the edge of the Au pattern. Consequently, A blade with a jagged microscale structure was fabricated using an optimized process to reduce the friction between each microscale edge and the material being cut. A larger edge indicate a reduction in cutting force. A reduction in the cutting forces parallel to the x- and z-axes was clearly observed for the blade fabricated via electrolytic etching compared with that fabricated using reactive ion etching. The methodology used to control the inclination angle of a microscale edge using an Au pattern is significant for fabricating Ti-based sensors and devices.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.144 No.1 （2024） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 2-5 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/144/1/144_2/_article/-char/ja/