Near-zero Poisson's Ratio and Large-area Metamaterial Made of UV-PDMS Using Three-dimensional Backside Exposure

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2024/01/01

タイトル(英語): Near-zero Poisson's Ratio and Large-area Metamaterial Made of UV-PDMS Using Three-dimensional Backside Exposure

著者名: Riku Ito (Gunma University), Ten Sekiguchi (Gunma University), Vivek Anand Menon (The University of Tokyo), Ryo Ichige (Gunma University), Yuya Tanaka (Gunma University), Hiroshi Toshiyoshi (The University of Tokyo), Takaaki Suzuki (Gunma University)

著者名(英語): Riku Ito (Gunma University), Ten Sekiguchi (Gunma University), Vivek Anand Menon (The University of Tokyo), Ryo Ichige (Gunma University), Yuya Tanaka (Gunma University), Hiroshi Toshiyoshi (The University of Tokyo), Takaaki Suzuki (Gunma University)

キーワード: UV-PDMS，3D backside exposure，mechanical metamaterial，photolithography

要約(英語): In this study a micro-fabrication method is proposed for UV-PDMS, a UV-curable silicone rubber required for flexible polymer MEMS. The three-dimensional backside exposure method for structure fabrication using the flow of liquid UV-PDMS improved the relative patterning error of the dimensions from 40% to 12.5% compared to that with vertical backside exposure. In addition, large-sized specimens consisting of two-dimensional mechanical metamaterial structures were fabricated from UV-PDMS, and the elongation and Poisson’s ratio were evaluated by uniaxial tensile testing. The flexible structure of the metamaterial maintained a Poisson’s ratio near zero.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.144 No.1 （2024） 特集：センサ・マイクロマシン英文特集号

本誌掲載ページ: 17-22 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/144/1/144_17/_article/-char/ja/