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交番磁気力顕微鏡を用いた直流電流路周囲の磁場勾配観測

交番磁気力顕微鏡を用いた直流電流路周囲の磁場勾配観測

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カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2024/04/01

タイトル(英語): Imaging of Magnetic Field Gradient around a Current Path by Alternating Magnetic Force Microscopy

著者名: 角 真輝(千葉工業大学),大山 祐生(千葉工業大学),佐藤 宣夫(千葉工業大学)

著者名(英語): Masaki Sumi (Chiba Institute of Technology), Yuki Oyama (Chiba Institute of Technology), Nobuo Satoh (Chiba Institute of Technology)

キーワード: 交番磁気力顕微鏡,サブサーフェス磁気イメージング,電流経路可視化,原子間力顕微鏡  alternating magnetic force microscopy,subsurface magnetic field imaging,current path visualization,atomic force microscope

要約(英語): We have developed a multi-function scanning probe microscopy (Multi-SPM) system that integrates FM-AFM/KFM/A-MFM techniques for comprehensive imaging of current path within power semiconductor devices. This advanced Multi-SPM setup enables concurrent visualization of surface morphology, surface potential, and magnetic field intensity gradients. During both non-conduction and conduction of DC current, we were able to simultaneously investigate these parameters in the same spatial region. Notably, the magnetic field intensity gradient distribution accurately captured the static magnetic field generated by the DC current flow. Particular interest is the dynamic variation in intensity and polarity of the Hz component of the magnetic field gradient distribution in response to the conduction of current and its direction. Based on these findings, we can confidently affirm that A-MFM effectively enables the observation of magnetic fields surrounding direct current path.

本誌: 電気学会論文誌E(センサ・マイクロマシン部門誌) Vol.144 No.4 (2024)

本誌掲載ページ: 62-67 p

原稿種別: 論文/日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/144/4/144_62/_article/-char/ja/

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