支持基板上ATカット水晶振動子の形状の最適化

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2024/06/01

タイトル(英語): Optimization of AT-cut Quartz Crystal Resonator Shape on the Support Substrate

著者名: 新田　智也（新潟大学工学部），安田　倉土（新潟大学工学部），諸橋　奎人（新潟大学工学部），寒川　雅之（新潟大学工学部），安部　隆（新潟大学工学部）

著者名(英語): Tomoya Nitta (Faculty of Engineering, Niigata University), Kuraudo Yasuda (Faculty of Engineering, Niigata University), Keito Morohashi (Faculty of Engineering, Niigata University), Masayuki Sohgawa (Faculty of Engineering, Niigata University), Takashi Abe (Faculty of Engineering, Niigata University)

キーワード: 水晶振動子，バルク弾性波デバイス，支持基板，水晶振動子マイクロバランス，結晶方向　　Quartz resonator，bulk acoustic wave device，support substrate，Quartz crystal microbalance，crystal orientation

要約(英語): This paper addresses the optimization of AT-cut quartz crystal resonator shape on a support substrate. This resonator is capable of oscillating via a physical separator while reinforcing its mechanical strength by inserting the support substrate between the excitation electrode and the quartz substrate. The fabricated resonator was evaluated by changing the thickness of the support substrate, the crystal axis, and the distance between the electrodes of the excitation electrodes. Even when support substrates of different thicknesses were used, only the crystal plate on the support substrate was successfully excited. The data reproducibility was also obtained by bonding and fixing with PDMS. Furthermore, the electromechanical coupling coefficient increased, and the impedance decreased when the excitation electrode spacing was increased. The frequency response to mass loading showed excellent linearity, indicating that this quartz crystal resonator can be used as a QCM.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.144 No.6 （2024）

本誌掲載ページ: 136-140 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/144/6/144_136/_article/-char/ja/