Non-linear Behavior of pMUT for High Sound Pressure Generation

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2024/06/01

タイトル(英語): Non-linear Behavior of pMUT for High Sound Pressure Generation

著者名: Wei Fang (Department of Robotics, Tohoku University), Andrea Vergara (Department of Robotics, Tohoku University), Shuji Tanaka (Department of Robotics, Tohoku University)

著者名(英語): Wei Fang (Department of Robotics, Tohoku University), Andrea Vergara (Department of Robotics, Tohoku University), Shuji Tanaka (Department of Robotics, Tohoku University)

キーワード: non-linearity，fitting，haptic perception，pMUT

要約(英語): High sound pressure is always preferred in pMUT (piezoelectric micromachined ultrasonic transducer) applications, and large displacement becomes the key to achieving high SPL (sound pressure level). However, large displacement also leads to non-linearity, which will bring significant deviations from the design goals and is usually difficult to predict in simulation by finite element method. To investigate the non-linear characteristics, non-linear fitting was used to quantitatively analyze two different structures in this study. The frequency response and quality factor change experimentally observed in non-linear region were discussed. In addition, a structure with a central mass attached to promote piston-like vibration was investigated. Compared to the conventional structure, the proposed structure had a 30% smaller non-linear coefficient and an 81.3% larger non-linear damping. However, higher SPL was not obtained due to the lower natural frequency and amplitude of displacement.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.144 No.6 （2024）

本誌掲載ページ: 149-155 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/144/6/144_149/_article/-char/ja/