Cr-NおよびFe-Pd薄膜のひずみ・温度同時計測触覚センサへの応用

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2024/09/01

タイトル(英語): Application of Cr-N and Fe-Pd Thin Films to Tactile Sensors for Simultaneous Strain and Temperature Measurement

著者名: 佐々木　祥弘（（公財）電磁材料研究所），丹羽　英二（（公財）電磁材料研究所）

著者名(英語): Yoshihiro Sasaki (Research Institute for Electromagnetic Materials), Eiji Niwa (Research Institute for Electromagnetic Materials)

キーワード: 触覚センサ，温度センサ，ひずみセンサ，Cr-N，Fe-Pd，薄膜　　tactile sensor，temperature sensor，strain sensor，Cr-N，Fe-Pd，thin film

要約(英語): The authors have studied a tactile sensor that simultaneously detects strain and temperature. In this paper, we used a Cr-N alloy thin film with high strain sensitivity and low temperature sensitivity and Fe-Pd with high temperature sensitivity and low strain sensitivity as strain and temperature sensors for a composite tactile sensor. We prototyped the composite tactile sensor, conducted simultaneous application tests of strain (load) and temperature, and discussed correction methods to improve detection accuracy. The fabricated composite tactile sensor enabled simultaneous measurement of strain (load) and temperature. We also confirmed that it is possible to compensate for each other in real time through simple calculations, without the need for a special compensation circuit by using two thin films with the above characteristics.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.144 No.9 （2024） 特集：ヒト感性デバイスのための機能性材料と応用技術

本誌掲載ページ: 271-281 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/144/9/144_271/_article/-char/ja/