ポリイミドを基板としたCr-N薄膜ひずみゲージ素子の作製と微圧センサ応用

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2024/11/01

タイトル(英語): Fabrication and Low Range Pressure Sensor Application of Polyimide Based Cr-N Thin Film Strain Gauge Element

著者名: 佐々木　祥弘（（公財）電磁材料研究所），丹羽　英二（（公財）電磁材料研究所）

著者名(英語): Yoshihiro Sasaki (Research Institute for Electromagnetic Materials), Eiji Niwa (Research Institute for Electromagnetic Materials)

キーワード: Cr-N，感歪薄膜，ひずみゲージ，圧力センサ，ポリイミド　　Cr-N，strain sensitive thin film，strain gauge，pressure sensor，polyimide

要約(英語): We have developed a Cr-N alloy thin film showing a gauge factor (Gf) of about 10 and a temperature coefficient of resistivity (TCR) of about zero, which is expected as a new strain gauge material in the next generation. In this study, we have investigated the fabrication of polyimide-based Cr-N thin films and the pressure sensor application for very low pressure range using the films. We have found out that the usable crack free Cr-N thin films were obtained on polyimide bases due to using the lower spattering gas pressure, and also enabled to detect the very low range pressure of 1-30kPa sensitively.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.144 No.11 （2024） 特集：化学物質の高次センシングと解析技術

本誌掲載ページ: 375-383 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/144/11/144_375/_article/-char/ja/