• Proposal of Decoupling Control Method for High-Precision Stages Using Multiple Actuators Considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation
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Proposal of Decoupling Control Method for High-Precision Stages Using Multiple Actuators Considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation

Proposal of Decoupling Control Method for High-Precision Stages Using Multiple Actuators Considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation

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¥440 JPY
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カテゴリ: 国際会議

論文No: TT3-1-6

グループ名: SAMCON2015

発行日: 2016/11/25

著者名(英語): Wataru Ohnishi Hiroshi Fujimoto (The University of Tokyo) Koichi Sakata Kazuhiro Suzuki Kazuaki Saiki (Nikon Corporation)

原稿種別: 英語

PDFファイルサイズ: 1,657 Kバイト

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