Long Surface Wave Produced Plasma ( SWP ) Cable

カテゴリ: 全国大会

論文No: 1-201

グループ名: 【全国大会】平成13年電気学会全国大会論文集

発行日: 2001/03/21

タイトル(英語): Long Surface Wave Produced Plasma ( SWP ) Cable

著者名: Shamim Ahmad(Chubu University),Yoshitaka Okayashu(Chubu University),Shunjiro Ikezawa(Chubu University),Kiyohide Baba(Chubu University),Yoji Hayashi(Chubu University),Keiji Nakamura(Chubu University),Shigehiko Nonaka(Toyota Tech. Institute),Mutsumi Tuda(Mitsubishi Electrc Co. Ltd),Masaaki Nagatsu(Nagoya University),Masashi Kando(Shizuoka Univer)

著者名(英語): Shamim Ahmad(Chubu University),Yoshitaka Okayashu(Chubu University),Shunjiro Ikezawa(Chubu University),Kiyohide Baba(Chubu University),Yoji Hayashi(Chubu University),Keiji Nakamura(Chubu University),Shigehiko Nonaka(Toyota Tech. Institute),Mutsumi Tuda(Mitsubishi Electrc Co. Ltd),Masaaki Nagatsu(Nagoya University),Masashi Kando(Shizuoka Univer)

要約(日本語): Recently, the surface wave produced plasma (SWP) has been paid attractive attention in the processing plasma, not only in the large area flat plasma source. We have developed a new SWP using a long coaxial flexible antenna applying to produce various type

原稿種別: 日本語

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