Large Area Electron-Beam-Excited Plasma ( EBEP ) of Meter Size

カテゴリ: 全国大会

論文No: 1-236

グループ名: 【全国大会】平成13年電気学会全国大会論文集

発行日: 2001/03/21

タイトル(英語): Large Area Electron-Beam-Excited Plasma ( EBEP ) of Meter Size

著者名: Shunjiro Ikezawa(Chubu University),Halida Homyara(Chubu University),Kiyohide Baba(Chubu University),Toshitaro Yoshioka(Chubu University),Keiji Nakamura(Chubu University),Tosin Famakinwa(Kiev Polytech. Institute),Hirobumi Oda(Itoh Optical Indust. Co. Ltd),Kazuki Yoshimura(National Indust. Research Inst. Nagoya),Hiroshi Taoda(National Indust. Research Inst. Nagoya)

著者名(英語): Shunjiro Ikezawa(Chubu University),Halida Homyara(Chubu University),Kiyohide Baba(Chubu University),Toshitaro Yoshioka(Chubu University),Keiji Nakamura(Chubu University),Tosin Famakinwa(Kiev Polytech. Institute),Hirobumi Oda(Itoh Optical Indust. Co. Ltd),Kazuki Yoshimura(National Indust. Research Inst. Nagoya),Hiroshi Taoda(National Indust. Research Inst. Nagoya)

要約(日本語): In order to coat TiO2 film over large area for an industrial application, we have developed a large area electron-beam-excited plasma (EBEP) of meter size. Taking advantage of the remarkable features of controlled-EBEP, the composition and the thickness o

原稿種別: 日本語

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