Decomposition of Perfluorinated Compound Gas Using Inductively Coupled Plasma

カテゴリ: 全国大会

論文No: 1-095

グループ名: 【全国大会】平成14年電気学会全国大会論文集

発行日: 2002/03/26

タイトル(英語): Decomposition of Perfluorinated Compound Gas Using Inductively Coupled Plasma

著者名: Raju Ramasamy(Chuo university),Daisuke Kudo(Tokai university),Haruo Shindo(Tokai university),Tsuginori Inaba(Chuo university)

著者名(英語): Raju Ramasamy(Chuo university),Daisuke Kudo(Tokai university),Haruo Shindo(Tokai university),Tsuginori Inaba(Chuo university)

要約(日本語): Decomposition of the enviromentally toxic gases using plasma is most popular technique world wide. In the present work one of the toxic semiconductor gases C4F8 have been tested for decomposition using inductively coupled plasma. The advantage of electron enery control on decomposition of the parent gas was studied intensively and reported.

原稿種別: 日本語

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