Magnetic near field measurements using Micro-fabricated thick-film Shielded Loop Coil

カテゴリ: 全国大会

論文No: 2-194

グループ名: 【全国大会】平成14年電気学会全国大会論文集

発行日: 2002/03/26

タイトル(英語): Magnetic near field measurements using Micro-fabricated thick-film Shielded Loop Coil

著者名: 山口 正洋(東北大学),卜金清 (東北大学),荒井 賢一(東北大学),玉置 尚哉(日本電気),増田 則夫(日本電気),栗山 敏秀(日本電気)

著者名(英語): Masahiro Yamaguchi(Tohoku University),Jin Ching Bu (Tohoku University),Ken-ichi Arai(Tohoku University),Naoya Tamaki(NEC Corporation),Norio Masuda(NEC Corporation),Toshihide Kuriyama(NEC Corporation)

要約(日本語): In this paper, we present a new miniature coil with multi-layer structure for high frequency magnetic near field measurement. This coil has two shielded ground layers having 10 micron thickness, and according to skin effect, it can be applied to measure magnetic field from 100MHz to 10GHz with more accuracy. We also investigated how this coil restrains induced voltage which due to electric field. The coil also can be utilized to explore current source with high spatial resolution, non-contacting with DUT. This is the first time we down the size of the loop to 20 micronx20 micron.

原稿種別: 日本語

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